gravity deformation meaning in English
重力变形
Examples
- Generally , the gravity introduced deformation of an optical lens with smaller aperture ( < ( 100mm ) within visible band is about ( / 20 even less than this value . for general optical lens , this error level can be entirely neglected . but for the high - accuracy optical system within extreme ultraviolet band , the error caused by gravity deformation will lead to imaging quality degradation
本文较为系统地介绍了光学镜头的装配与调校方法，一般地讲，在可见波段内，光学镜片口径较小（ < 100mm ）时，重力引起的变形一般/ 20左右甚至更小，对于一般的光学镜头这样量级的误差完全可以忽略，但在极紫外短波长的高精度光学系统中重力变形带来的误差会使光学系统成像质量下降。 - The gravity analysis is carried out especially for the synthetic fused silica and calcium fluoride used in 193nm lithographic objective as well as the optical elements with structural sizes of ( 200mm ~ ( 300mm . large numbers of analysis data for surface shape error are obtained by using algor finite element analysis software . then these data are plotted into curves and comparison analysis will be carried out , finally the measures and schemes for reducing gravity deformation are proposed
因此，本论文重点对大口径光学系统在高精度光学镜头装校中，因重力变形进行了详细的分析研究，特别针对193nm光刻物镜系统所使用的材料sytheticfusedsilica和caleiumfluoride以及用到的结构尺寸200mm ~ 300mm光学零件进行了重力变形分析，使用algor有限元分析软件获得了大量的面形误差分析数据，然后将这些数据绘成曲线进行对比分析，最后提出了减小重力变形的措施与方案，并进行了实验，验证了分析结果是正确的，减小重力变形的方法是有效的。